Label Number | Parameter | Command/Monitor> |
---|---|---|
Sputter Ion Source | ||
1a | airflow, Cs boiler | amps, volts, deg.C |
2a | ionizer | amps, volts |
3a | suppressor | KV, mA |
4a | cone position | |
5a | bias | volts |
6a | gridded lens | KV |
7a | steerer | volts |
Duoplasmatron Ion Source | ||
1b | filament | amps, volts |
2b | arc | amps |
3b | magnet | amps |
4b | probe | KV, amps |
5b | extraction | KV, mA |
6b | focus | KV, mA |
7b | attachment | KV, mA |
8b | heater | amps, deg.C |
9b | source gas, adder gas | flow rates |
Ion Injection Section | ||
10 | inflection | amps, Kgauss |
11 | Einzel lens | KV |
12 | LE slit | amps: L,R,U,D |
13 | LE BPM | gain: hi/lo, on/off, amps |
14 | LE cup | in/out, amps |
15 | LE steerers | (1Y,1X,2Y,2X) volts |
16 | gridded lens | KV, mA |
High Voltage Generator | ||
17 | LE drive motor | KW, start/off |
18 | LE column | amps |
19 | LE charge | volts, amps |
20 | stripper gas flow | increase/decrease |
21 | terminal | MV |
22 | corona | amps, in/out, position |
23 | foil | up/down |
24 | terminal steerer | up/down |
25 | HE charge | volts, amps |
26 | HE column | amps |
27 | HE drive motor | KW, start/off |
Beam Analysis Section | ||
28 | HE BPM | gain:hi/lo, on/off, amps |
29 | HE cup | in/out, amps |
30 | HVEC Quad | #1:amps, #2:amps |
31 | HE steerers | (1X,1Y,2X,2Y) volts |
32 | object BPM | gain:hi/lo, on/off, amps |
33 | object slits | amps: L,R,U,D |
34 | analysis magnet | up/down, dial, amps, freq, Kgauss |
35 | image slits | amps: L,R,U,D |
36 | image cup | in/out, amps |
37 | image BPM | gain:hi/lo, on/off, amps |
38 | Quad A | amps, increase/decrease |
39 | Quad B | amps, increase/decrease |
40 | Quad C | amps, increase/decrease |