Numerical Legend for Figure 1
Label NumberParameterCommand/Monitor>
Sputter Ion Source
1aairflow, Cs boileramps, volts, deg.C
2aionizeramps, volts
3asuppressorKV, mA
4acone position
5abiasvolts
6agridded lensKV
7asteerervolts
Duoplasmatron Ion Source
1bfilamentamps, volts
2barcamps
3bmagnetamps
4bprobeKV, amps
5bextractionKV, mA
6bfocusKV, mA
7battachmentKV, mA
8bheateramps, deg.C
9bsource gas, adder gas flow rates
Ion Injection Section
10inflectionamps, Kgauss
11Einzel lensKV
12LE slitamps: L,R,U,D
13LE BPMgain: hi/lo, on/off, amps
14LE cupin/out, amps
15LE steerers(1Y,1X,2Y,2X) volts
16gridded lensKV, mA
High Voltage Generator
17LE drive motorKW, start/off
18LE columnamps
19LE chargevolts, amps
20stripper gas flowincrease/decrease
21terminalMV
22coronaamps, in/out, position
23foilup/down
24terminal steererup/down
25HE chargevolts, amps
26HE columnamps
27HE drive motorKW, start/off
Beam Analysis Section
28HE BPMgain:hi/lo, on/off, amps
29HE cupin/out, amps
30HVEC Quad#1:amps, #2:amps
31HE steerers(1X,1Y,2X,2Y) volts
32object BPMgain:hi/lo, on/off, amps
33object slitsamps: L,R,U,D
34analysis magnetup/down, dial, amps, freq, Kgauss
35image slitsamps: L,R,U,D
36image cupin/out, amps
37image BPMgain:hi/lo, on/off, amps
38Quad Aamps, increase/decrease
39Quad Bamps, increase/decrease
40Quad Camps, increase/decrease